European Conference on Mask Technology for Integrated Circuits and Microcomponents

European Conference on Mask Technology for Integrated Circuits and Microcomponents

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Uwe F. W. Behringer, Semiconductor Equipment and Materials Institute. ... and review feature sizes below 1 OOnm (Fig. 6). ... software concept of the AfweTec CD tools provides a user friendly interface for operators (LMP) to navigate manually to the measurement locations. ... This approach is always ideal if only PCMs (Process Control Monitors) and no or only a few active structures are to be measured.


Title:European Conference on Mask Technology for Integrated Circuits and Microcomponents
Author:Uwe F. W. Behringer, Semiconductor Equipment and Materials Institute. Europe
Publisher:Society of Photo Optical - 2003
ISBN-13:

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