Integrated Circuit Metrology, Inspection, and Process Control

Integrated Circuit Metrology, Inspection, and Process Control

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... Prometrix Corporation John R. Frank, SEMATECH Session 10 Particle and Defect Metrology Marylyn H. Bennett, Texas Instruments Inc. Kevin M. Monahan, Metrologix, Inc. Introduction Integrated circuit fabrication will be increasingly reliantanbsp;...


Title:Integrated Circuit Metrology, Inspection, and Process Control
Author:
Publisher:Society of Photo Optical - 1993
ISBN-13:

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