An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends. A solutions manual is available upon request from the Wiley editorial board.This authoritative guide combines user-friendly organization for quick reference with a masterful pedagogical design that helps build the readera#39;s understanding from section to section and from one chapter to the next.
|Author||:||S. M. Sze|
|Publisher||:||Wiley-Interscience - 1994-10-28|