Ultrasonic surface micromachine actuation applications to release, microstructure assembly, and micromotors

Ultrasonic surface micromachine actuation applications to release, microstructure assembly, and micromotors

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The system consists of a diode laser, laser driver circuit, microscope lens, and beam splitter as shown in Figure C.1. ... CCD cameras are not fast enough to capture these vibrations but there is an easy way around this: pulse the laser with theanbsp;...


Title:Ultrasonic surface micromachine actuation applications to release, microstructure assembly, and micromotors
Author:Ville Kaajakari
Publisher: - 2002
ISBN-13:

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